EDX Tomography Acquisition (3D EDX)

STEM tomography combined with simultaneous EDX readout to deliver 3D chemical information

Three-dimensional imaging of what’s in your sample and where it is

Microscope automation through TEM Center integration controls

Stage tilt

STEM autofocus

XY-drift correction

User-definable and independent acquisition parameters for autofocus, XY-drift correction and tomographic EDX map series acquisition sections

Bandpass-tunable XY-drift correction

Per-frame drift correction available

Dynamic focus correction available

Intuitive workflow

Screenshot Topspin User Interaction – GaN HEMT
(STEM & Precession Electron Diffraction)

Mayenite mineral electron diffraction pattern
(changing precession angle 0-3 deg)